Patent Assignment
Reel/Frame 057714/0447
Assignment of Assignor's Interest
Recorded: 2021-10-06
Pages: 5
Assignors
LIN, CHENG-MING
Executed: 2021-08-10
LIN, HAN-YU
Executed: 2021-08-23
WOON, WEI-YEN
Executed: 2021-08-10
KHADERBAD, MRUNAL ABHIJITH
Executed: 2021-09-05
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Device, and Method for Protecting Low-K Dielectric Feature of Semiconductor Device