Patent Assignment
Reel/Frame 057730/0001
Assignment of Assignor's Interest
Recorded: 2021-10-07
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for Characterizing the Surface Shape of a Test Object