Patent Assignment
Reel/Frame 057769/0188
Assignment of Assignor's Interest
Recorded: 2021-10-12
Pages: 8
Assignors
TSIATMAS, ANAGNOSTIS
Executed: 2017-11-28
HINNEN, PAUL CHRISTIAAN
Executed: 2017-11-29
MC NAMARA, ELLIOTT GERARD
Executed: 2017-11-28
SHAHRJERDY, MIR HOMAYOUN
Executed: 2017-11-28
THEEUWES, THOMAS
Executed: 2018-01-08
DE LA FUENTE VALENTIN, MARIA ISABEL
Executed: 2017-12-22
DEN BOEF, ARIE JEFFREY
Executed: 2018-02-06
WANG, SHU-JIN
Executed: 2017-11-28
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus to Determine a Patterning Process Parameter