Patent Assignment
Reel/Frame 057797/0521
Assignment of Assignor's Interest
Recorded: 2021-10-14
Pages: 3
Assignors
FU, SHIH-KANG
Executed: 2019-08-30
LEE, MING-HAN
Executed: 2019-08-30
SHUE, SHAU-LIN
Executed: 2019-08-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices