Patent Assignment
Reel/Frame 057809/0282
Assignment of Assignor's Interest
Recorded: 2021-10-15
Pages: 10
Assignors
KOBAYASHI, TAKESHI
Executed: 2021-10-06
ANDO, TAKESHI
Executed: 2021-10-06
ITO, KIWAMU
Executed: 2021-10-06
TANAKA, YUKI
Executed: 2021-10-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Generating Apparatus, Plasma Processing Apparatus, and Plasma Processing Method