Patent Assignment
Reel/Frame 057814/0659
Assignment of Assignor's Interest
Recorded: 2021-10-14
Pages: 3
Assignor
TANAKA, HIROSHI
Executed: 2021-10-04
Assignee
MITSUBISHI ELECTRIC CORPORATION
7-3, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8310, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus