Patent Assignment
Reel/Frame 057824/0634
Assignment of Assignor's Interest
Recorded: 2021-10-18
Pages: 5
Assignors
CHEN, TAO-HSIN
Executed: 2020-08-09
CHEN, LI-JUI
Executed: 2020-08-12
LEE, CHIA-YU
Executed: 2020-08-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Euv Wafer Defect Improvement and Method of Collecting Nonconductive Particles