Patent Assignment
Reel/Frame 057834/0347
Assignment of Assignor's Interest
Recorded: 2021-10-19
Pages: 7
Assignors
SAWACHI, ATSUSHI
Executed: 2021-10-13
HIROSE, JUN
Executed: 2021-10-12
NISHIJIMA, TAKUYA
Executed: 2021-10-13
SONE, ICHIRO
Executed: 2021-10-14
SATO, SUGURU
Executed: 2021-10-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing System, and Maintenance Method