Patent Assignment
Reel/Frame 057842/0462
Assignment of Assignor's Interest
Recorded: 2021-10-20
Pages: 3
Assignor
KUBOTA, SHINJI
Executed: 2021-10-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method