Patent Assignment
Reel/Frame 057844/0165
Assignment of Assignor's Interest
Recorded: 2021-10-20
Pages: 2
Assignee
KOREA ELECTRONICS TECHNOLOGY INSTITUTE
25, SAENARI-RO, BUNDANG-GU, SEONGNAM-SI, GYEONGGI-DO, 13509, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Depositing an Aluminum Nitride (Ain) Thin Film