Patent Assignment
Reel/Frame 057849/0023
Assignment of Assignor's Interest
Recorded: 2021-10-20
Pages: 3
Assignor
LAUFFER, PETER SEBALD
Executed: 2021-10-20
Assignee
AIXTRON SE
DORNKAULSTRASSE 2, HERZOGENRATH, 52134, GERMANY
Covered Property
(1)
Cvd Reactor Having Means for Locally Influencing the Susceptor Temperature