Patent Assignment
Reel/Frame 057860/0688
Assignment of Assignor's Interest
Recorded: 2021-10-20
Pages: 3
Assignee
EPILUVAC AB
IDEONGATAN 3A, LUND, 22370, SWEDEN
Covered Property
(1)
Device and Method for Ensuring Planarity of a Semiconductor Wafer During Epitaxial Growth
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.