Patent Assignment
Reel/Frame 057864/0019
Assignment of Assignor's Interest
Recorded: 2021-10-21
Pages: 4
Assignors
STIEPAN, HANS MICHAEL
Executed: 2021-10-06
FUCHS, SEBASTIAN
Executed: 2021-10-04
HETZLER, JOCHEN
Executed: 2021-10-05
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Measurement Method for Interferometrically Determining a Surface Shape