Patent Assignment
Reel/Frame 057893/0320
Assignment of Assignor's Interest
Recorded: 2021-10-25
Pages: 2
Assignors
HIROTA, KOSA
Executed: 2021-04-09
SUMIYA, MASAHIRO
Executed: 2021-04-12
EITOKU, HIROFUMI
Executed: 2021-04-16
NAKATSUKA, TAKANORI
Executed: 2021-04-16
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, 1056409, JAPAN
Covered Property
(1)
Plasma Processing Method