Patent Assignment
Reel/Frame 057918/0750
Assignment of Assignor's Interest
Recorded: 2021-10-26
Pages: 4
Assignors
SHIU, YI-FAM
Executed: 2021-06-28
WU, CHENG-LUNG
Executed: 2021-06-28
CHU, YANG-ANN
Executed: 2021-06-28
LIU, HSU-SHUI
Executed: 2021-06-29
PAI, JIUN-RONG
Executed: 2021-06-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Systems, Devices, and Methods for Air Flow Optimization Including Adjacent a Foup