Patent Assignment
Reel/Frame 057919/0486
Assignment of Assignor's Interest
Recorded: 2021-10-26
Pages: 6
Assignors
LONG, MAOLIN
Executed: 2021-10-25
WANG, YUHOU
Executed: 2021-10-25
PATERSON, ALEXANDER MILLER
Executed: 2021-10-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Dual-Frequency, Direct-Drive Inductively Coupled Plasma Source