Patent Assignment
Reel/Frame 057927/0517
Assignment of Assignor's Interest
Recorded: 2021-10-27
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for Operating a Bending Beam in a Closed Control Loop