Patent Assignment
Reel/Frame 057947/0791
Assignment of Assignor's Interest
Recorded: 2021-10-28
Pages: 4
Assignor
WU, PING
Executed: 2021-10-22
Assignee
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD
1525 ZHANGDONG ROAD, ZHANGJIANG HIGH-TECH PARK, SHANGHAI, 201203, CHINA
Covered Property
(1)
Displacement Measuring Apparatus, Displacement Measuring Method and Photolithography Device