Patent Assignment
Reel/Frame 057951/0899
Assignment of Assignor's Interest
Recorded: 2021-10-28
Pages: 3
Assignor
AOKI, YUSUKE
Executed: 2021-10-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus