Patent Assignment
Reel/Frame 057993/0576
Assignment of Assignor's Interest
Recorded: 2021-11-02
Pages: 8
Assignors
LI, NING
Executed: 2016-01-07
NGUYEN, VICTOR
Executed: 2015-01-15
BALSEANU, MIHAELA
Executed: 2016-06-03
XIA, LI-QUN
Executed: 2015-01-15
TANAKA, KEIICHI
Executed: 2016-06-03
MARCUS, STEVEN D.
Executed: 2015-01-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Self-Aligned Double Patterning With Spatial Atomic Layer Deposition