Patent Assignment
Reel/Frame 058064/0959
Assignment of Assignor's Interest
Recorded: 2021-11-09
Pages: 3
Assignors
BLACKWELL, JAMES M.
Executed: 2018-04-12
CLENDENNING, SCOTT B.
Executed: 2018-04-12
TAN, CEN
Executed: 2018-04-12
KRYSAK, MARIE
Executed: 2018-04-12
Assignee
INTEL CORPORATION
2200 MISSION COLLEGE BOULEVARD, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Selective Etching and Controlled Atomic Layer Etching of Transition Metal Oxide Films for Device Fabrication