Patent Assignment
Reel/Frame 058067/0905
Assignment of Assignor's Interest
Recorded: 2021-11-10
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Modifying Ferroelectric Properties of Hafnium Oxide with Hafnium Nitride Layers