Patent Assignment
Reel/Frame 058068/0326
Assignment of Assignor's Interest
Recorded: 2021-11-10
Pages: 3
Assignors
MATYUSHKIN, ALEXANDER
Executed: 2018-05-11
COMENDANT, KEITH LAURENCE
Executed: 2018-05-11
HOLLAND, JOHN PATRICK
Executed: 2018-05-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns