Patent Assignment
Reel/Frame 058101/0548
Assignment of Assignor's Interest
Recorded: 2021-11-12
Pages: 10
Assignors
BUROV, ANATOLY
Executed: 2021-09-29
PARSEY, GUY
Executed: 2021-04-07
BAI, KUNLUN
Executed: 2021-09-29
VUKKADALA, PRADEEP
Executed: 2021-09-30
ZHANG, CAO
Executed: 2021-04-07
GRAVES, JOHN S.
Executed: 2021-09-29
LI, XIAOHAN
Executed: 2021-04-07
HIGGINS, CRAIG
Executed: 2021-04-18
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Prediction and Metrology of Stochastic Photoresist Thickness Defects