Patent Assignment
Reel/Frame 058120/0105
Assignment of Assignor's Interest
Recorded: 2021-11-16
Pages: 7
Assignors
MARKS, ZEFRAM
Executed: 2020-05-01
JUSCHKIN, LARISSA
Executed: 2020-05-01
WACK, DANIEL C.
Executed: 2021-11-15
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optical Etendue Matching Methods for Extreme Ultraviolet Metrology