Patent Assignment
Reel/Frame 058139/0312
Assignment of Assignor's Interest
Recorded: 2021-11-17
Pages: 7
Assignor
MOTOMURA, SEIICHIRO
Executed: 2021-10-26
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Transport System, Inspection System, and Inspection Method