Patent Assignment
Reel/Frame 058150/0811
Assignment of Assignor's Interest
Recorded: 2021-11-18
Pages: 7
Assignors
HUANG, HAIFENG
Executed: 2021-02-10
SHI, RUI-FANG
Executed: 2021-03-01
WACK, DANIEL C.
Executed: 2021-11-15
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Fast Phase-Shift Interferometry by Laser Frequency Shift