Patent Assignment
Reel/Frame 058156/0190
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded: 2021-11-18
Received: 2021-11-18
Pages: 4
Assignors
YEH, TSE-AN
Executed: 2020-11-23
CHEN, CHUN KUANG
Executed: 2020-12-28
ZHENG, JUN-FEI
Executed: 2020-12-28
LEAVY, MONTRAY
Executed: 2020-12-30
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MA, 01821, UNITED STATES
Covered Application
(1)
PHASE-SHIFT RETICLE FOR USE IN PHOTOLITHOGRAPHY
App. No. 17/529,840
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