IP Library › Granted Patent US 12,078,921
Granted Patent Utility
US 12,078,921 · Confirmation No. 7178

PHASE-SHIFT RETICLE FOR USE IN PHOTOLITHOGRAPHY

Applicant: ENTEGRIS, INC.
⬇ PDF
 Code Description Pages PDF
2024-09-03 EGRANT.PDF Digitally signed official patent eGrant document — View
2024-09-03 EGRANT.NTF eGrant day-of Notification 2 View
2024-08-14 ISSUE.NTF Issue Notification 2 View
2024-08-05 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2024-08-05 1449 List of References cited by applicant and considered by examiner 4 View
2024-07-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2024-07-15 N417.PYMT Electronic Fee Payment 2 View
2024-07-15 FOR Foreign Reference 17 View
2024-07-15 N417 Electronic Filing System Acknowledgment Receipt 3 View
2024-07-15 FOR Foreign Reference 37 View
2024-07-15 FOR Foreign Reference 42 View
2024-07-15 FOR Foreign Reference 55 View
2024-07-15 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2024-05-29 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2024-05-22 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2024-05-22 SRFW Search information including classification, databases and other search related notes 1 View
2024-05-22 FWCLM Index of Claims 1 View
2024-05-22 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 3 View
2024-05-22 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2024-05-22 BIB Bibliographic Data Sheet 1 View
2024-05-22 SRNT Examiner's search strategy and results 16 View
2024-03-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection — View
2024-03-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2024-03-08 CLM Claims 4 View
2024-03-08 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2024-03-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2024-03-08 WFEE Fee Worksheet (SB06) 1 View
2023-12-29 CTNF Non-Final Rejection 15 View
2023-12-29 892 List of references cited by examiner 1 View
2023-12-29 FWCLM Index of Claims 1 View
2023-12-29 SRFW Search information including classification, databases and other search related notes 1 View
2023-12-29 SRNT Examiner's search strategy and results 1 View
2023-12-29 SRNT Examiner's search strategy and results 14 View
2023-10-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2023-10-13 CLM Claims 3 View
2023-10-13 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2023-10-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-10-13 WFEE Fee Worksheet (SB06) 1 View
2023-08-15 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2023-07-13 CTNF Non-Final Rejection 11 View
2023-07-13 892 List of references cited by examiner 1 View
2023-07-13 SRFW Search information including classification, databases and other search related notes 1 View
2023-07-13 1449 List of References cited by applicant and considered by examiner 4 View
2023-07-13 1449 List of References cited by applicant and considered by examiner 4 View
2023-07-13 SRNT Examiner's search strategy and results 10 View
2023-07-13 FOR Foreign Reference 6 View
2023-07-13 1449 List of References cited by applicant and considered by examiner 4 View
2023-07-13 SRNT Examiner's search strategy and results 2 View
2023-07-13 FOR Foreign Reference 16 View
2023-03-17 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2023-03-17 FOR Foreign Reference 54 View
2023-03-17 FOR Foreign Reference 138 View
2023-03-17 FOR Foreign Reference 50 View
2023-03-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-06-27 OATH Oath or Declaration filed 2 View
2022-06-27 OATH Oath or Declaration filed 2 View
2022-06-27 OATH Oath or Declaration filed 1 View
2022-06-27 OATH Oath or Declaration filed 1 View
2022-06-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-05-26 NTC.PUB Notice of Publication 1 View
2022-05-25 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2022-05-25 FOR Foreign Reference 21 View
2022-05-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-02-23 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2022-02-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-12-06 WFEE Fee Worksheet (SB06) 1 View
2021-12-06 APP.FILE.REC Filing Receipt 4 View
2021-12-06 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2021-11-18 WFEE Fee Worksheet (SB06) 2 View
2021-11-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-11-18 PA.. Power of Attorney 1 View
2021-11-18 WFEE Fee Worksheet (SB06) 2 View
2021-11-18 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-11-18 TRNA Transmittal of New Application 2 View
2021-11-18 ADS Application Data Sheet 9 View
2021-11-18 SPEC Specification 25 View
2021-11-18 CLM Claims 3 View
2021-11-18 ABST Abstract 1 View
2021-11-18 DRW Drawings-only black and white line drawings 18 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 12,078,921
App. No.
17/529,840
Filed
2021-11-18
Granted
2024-09-03
Pub. No.
US20220163881A1
Art Unit
1733
PTA
-54 days