Patent Assignment
Reel/Frame 060614/0980
SECURITY INTEREST
Recorded: 2022-07-08
Received: 2022-07-08
Pages: 19
Assignors
ENTEGRIS GP, INC.
Executed: 2022-07-06
ENTEGRIS, INC.
Executed: 2022-07-06
POCO GRAPHITE, INC.
Executed: 2022-07-06
Assignee
MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
1300 THAMES STREET, 4TH FLOOR, THAMES STREET WHARF, BALTIMORE, MD, 21231, UNITED STATES
Covered Applications
(100)
MEMBRANES FOR ACID-SENSITIVE SOLVENTS
App. No. 17/543,362
→
MULTI-LAYER COMPOSITES WITH VARIED LAYER THICKNESSES AND RELATED METHODS
App. No. 17/541,690
→
POROUS POLYETHYLENE FILTER MEMBRANE, AND RELATED FILTERS AND METHODS
App. No. 17/532,773
→
PHASE-SHIFT RETICLE FOR USE IN PHOTOLITHOGRAPHY
App. No. 17/529,840
→
FILTER APPARATUS WITH VENTED CORE, ELECTROSTATIC DISCHARGE MITIGATION, OR BOTH
App. No. 17/527,870
→
FILTER APPARATUS WITH VENTED CORE
App. No. 17/527,892
→
ARTICLES COATED WITH CRACK-RESISTANT FLUORO-ANNEALED FILMS AND METHODS OF MAKING
App. No. 17/527,228
→
MODIFIED CARBON ADSORBENTS
App. No. 17/522,970
→
COATED POROUS POLYMERIC MEMBRANES
App. No. 17/522,159
→
LOW METAL CONTENT POLYOLEFIN FILTER MEMBRANE
App. No. 17/512,474
→
SELECTIVE ALKYLATION OF CYCLOPENTADIENE
App. No. 17/507,004
→
METHOD FOR PREPARING IODOSILANES
App. No. 17/505,685
→
ADSORBENT-TYPE STORAGE AND DELIVERY VESSELS WITH HIGH PURITY DELIVERY OF GAS, AND RELATED METHODS
App. No. 17/505,735
→
Storage and Delivery Veseel for Storing GeH4, Using a Zeolitic Adsorbent
App. No. 17/495,363
→
Post CMP Cleaning Compositions
App. No. 17/492,257
→
Filtration Membranes, Systems, and Methods for Producing Purified Water
App. No. 17/491,700
→
Method and Systems Useful for Producing Aluminum Ions
App. No. 17/492,089
→
Microelectronic Device Cleaning Composition
App. No. 17/491,750
→
Membranes for Removing Metallic Species from Amines
App. No. 17/488,897
→
Self-Locking Manifold and Filter
App. No. 17/486,127
→
Etchant Compositions
App. No. 17/480,844
→
Ion Implantation System with Mixture of Arc Chamber Materials
App. No. 17/466,362
→
ELECTROSTATIC CHUCK WITH EMBOSSMENTS THAT COMPRISE DIAMOND-LIKE CARBON AND DEPOSITED SILICON-BASED MATERIAL, AND RELATED METHODS
App. No. 17/459,272
→
FLUORINATED COMPOSITIONS FOR ION SOURCE PERFORMANCE IMPROVEMENTS IN NITROGEN ION IMPLANTATION
App. No. 17/411,816
→
MAIN SEAL ASSEMBLY
App. No. 17/407,934
→
NITRIDE ETCHANT COMPOSITION AND METHOD
App. No. 17/402,126
→
GAS SUPPLY PACKAGES, ADSORBENTS, AND RELATED METHODS
App. No. 17/398,891
→
SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING SAME
App. No. 17/396,389
→
METHOD FOR REMOVING HARD MASKS
App. No. 17/389,879
→
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS
App. No. 17/388,990
→
CARBON-FREE LAMINATED HAFNIUM OXIDE/ZIRCONIUM OXIDE FILMS FOR FERROELECTRIC MEMORIES
App. No. 17/375,755
→
KIT FOR INSTALLING IMPELLER INTO PROCESS VESSEL
App. No. 17/375,855
→
CONNECTION ASSEMBLY AND FILTER ASSEMBLY
App. No. 17/370,855
→
GROUP VI PRECURSOR COMPOUNDS
App. No. 17/370,722
→
COATINGS THAT CONTAIN FLUORINATED YTTRIUM OXIDE AND A METAL OXIDE, AND METHODS OF PREPARING AND USING THE COATINGS
App. No. 17/370,810
→
PROCESS FOR PREPARING ORGANOTIN COMPOUNDS
App. No. 17/366,470
→
HARD ABRASIVE PARTICLE-FREE POLISHING OF HARD MATERIALS
App. No. 17/365,916
→
ACID RESISTANT FILTER MEDIA
App. No. 17/356,201
→
SILICON PRECURSOR COMPOUNDS AND METHOD FOR FORMING SILICON-CONTAINING FILMS
App. No. 17/356,252
→
COMPOSITE FILTER MEDIA
App. No. 17/354,921
→
ION-EXCHANGE MEMBRANES, FILTERS, AND METHODS
App. No. 17/350,970
→
Bulk Process Gas Purification Systems and Related Methods
App. No. 17/340,987
→
SILICON NITRIDE ETCHING COMPOSITION AND METHOD
App. No. 17/341,138
→
METHOD OF FORMING A LAMINATED SINGLE LAYER COMPOSITE MEMBRANE
App. No. 17/320,973
→
ELECTROSTATIC CHUCK HAVING A GAS FLOW FEATURE, AND RELATED METHODS
App. No. 17/317,585
→
REGULATOR ASSEMBLY AND TEST METHOD
App. No. 17/244,650
→
RETICLE POD SEALING
App. No. 17/244,571
→
METHOD OF PREPARING IODOSILANES AND COMPOSITIONS THEREFROM
App. No. 17/239,135
→
MULTI PIECE FITMENT FOR A FLUID CONTAINER
App. No. 17/237,865
→
MODULAR FILTER MANIFOLD
App. No. 17/232,780
→
RETICLE POD HAVING COATED SENSOR ZONES
App. No. 17/232,581
→
HYDROPHOBIC MEMBRANES AND MEMBRANE DISTILLATION METHODS
App. No. 17/232,416
→
ELECTROSTATIC DISCHARGE MITIGATION DEVICE
App. No. 17/232,489
→
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
App. No. 17/230,633
→
YTTRIUM FLUORIDE FILMS AND METHODS OF PREPARING AND USING YTTRIUM FLUORIDE FILMS
App. No. 17/230,742
→
PRECURSORS AND METHODS FOR PREPARING SILICON-CONTAINING FILMS
App. No. 17/214,701
→
MANIFOLD FOR A SUBSTRATE CONTAINER
App. No. 17/192,715
→
LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS
App. No. 17/184,273
→
CMP COMPOSITION FOR POLISHING HARD MATERIALS
App. No. 17/163,372
→
METHOD FOR NUCLEATION OF CONDUCTIVE NITRIDE FILMS
App. No. 17/161,332
→
METHOD FOR ETCHING OR DEPOSITION
App. No. 17/150,942
→
POROUS SINTERED METAL BODIES AND METHODS OF PREPARING POROUS SINTERED METAL BODIES
App. No. 17/151,010
→
METAL BODY HAVING MAGNESIUM FLUORIDE REGION FORMED THEREFROM
App. No. 17/125,539
→
FILTER LIFE INDICATOR MEDIA AND HOLDER
App. No. 17/124,375
→
SPIRALING POLYPHASE ELECTRODES FOR ELECTROSTATIC CHUCK
App. No. 17/122,959
→
ACCURATE TEMPERATURE READING OF FLUID NEAR INTERFACE
App. No. 17/116,738
→
DIFFUSION BARRIERS MADE FROM MULTIPLE BARRIER MATERIALS, AND RELATED ARTICLES AND METHODS
App. No. 17/115,196
→
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEPOSITION OF COBALT
App. No. 16/952,985
→
GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATION SYSTEM
App. No. 17/055,885
→
DENSIFIED SOLID PREFORMS FOR SUBLIMATION
App. No. 17/097,855
→
ENVIRONMENTAL CONTROL MATERIAL HOLDER
App. No. 17/091,642
→
RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE
App. No. 17/089,987
→
FILTER WITH IMPROVED FLUID FLOW
App. No. 17/076,204
→
OPTICAL SENSOR WINDOW CLEANER
App. No. 17/075,329
→
SYSTEM AND METHOD FOR REMOVING AIRBORNE MOLECULAR CONTAMINANTS FROM GAS STREAMS
App. No. 17/073,651
→
POROUS POLYMERIC MEMBRANE AND RELATED FILTERS AND METHODS
App. No. 17/066,209
→
RETICLE POD WITH WINDOW
App. No. 17/066,358
→
WET ETCHING COMPOSITION AND METHOD
App. No. 17/066,152
→
MEMBRANES WITH REDUCED PARTICLE FORMATION
App. No. 17/027,082
→
PLASMA IMMERSION METHODS FOR ION IMPLANTATION
App. No. 17/024,261
→
ELECTROSTATIC DISCHARGE MITIGATION DEVICE
App. No. 17/011,919
→
GROUP VI METAL DEPOSITION PROCESS
App. No. 17/002,646
→
FORMULATIONS FOR HIGH SELECTIVE SILICON NITRIDE ETCH
App. No. 17/000,045
→
GROUNDING MECHANISM FOR MULTI-LAYER FOR ELECTROSTATIC CHUCK, AND RELATED METHODS
App. No. 16/938,547
→
WAFER CUSHION
App. No. 16/929,428
→
POROUS SINTERED MEMBRANES AND METHODS OF PREPARING POROUS SINTERED MEMBRANES
App. No. 16/925,212
→
OXYHALIDE PRECURSORS
App. No. 16/923,899
→
POROUS CARBONACEOUS VACUUM CHAMBER LINERS
App. No. 16/923,724
→
METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE
App. No. 16/918,789
→
ION IMPLANTATION SYSTEM WITH MIXTURE OF ARC CHAMBER MATERIALS
App. No. 16/904,286
→
VAPOR DEPOSITION PRECURSOR COMPOUNDS AND PROCESS OF USE
App. No. 16/899,060
→
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
App. No. 16/898,149
→
MANIFOLD WITH MOVABLE CONNECTOLOGY
App. No. 16/886,231
→
SUBSTRATE CONTAINER VALVE ASSEMBLIES
App. No. 16/886,371
→
METHODS AND SYSTEMS FOR REMOVING AMMONIA FROM A GAS MIXTURE
App. No. 16/879,444
→
METHODS AND SYSTEMS FOR ADSORBING ORGANOMETALLIC VAPOR
App. No. 16/879,514
→
METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS
App. No. 16/868,973
→
SINTERED POROUS MATERIAL HAVING NODES AND FIBERS OF DIFFERENT MATERIALS, WITH DIFFERENT SINTERING POINTS, AND RELATED METHODS OF PREPARATION AND USE
App. No. 16/762,421
→
FILTER WITH ELECTROSTATIC DISCHARGE MITIGATION SLEEVE
App. No. 16/857,918
→
VAPORIZATION VESSEL AND METHOD
App. No. 16/856,687
→