IP Library Granted Patent US 11,826,696
Granted Patent B2
US 11,826,696 · App. 17/340,987 · Granted Nov 28, 2023

Bulk process gas purification systems and related methods

Inventors: Matthew Schlotterbeck (Atascadero, CA); Daimhin Paul Murphy (San Diego, CA)
Assignee: ENTEGRIS, INC.
B01D53/261B01D53/02B01D53/8668B01D2253/102B01D2257/504B01D2257/80
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Quick Facts
Patent No.
US 11,826,696
App. No.
17/340,987
Granted
Nov 28, 2023
Kind
B2
Abstract

Described are bulk process gas purification systems and related methods, including systems that are adapted to use a volume of gas at an exterior surface of a vessel, e.g., a flow of the gas, to control a temperature of the vessel interior during a recharging step, during a cooling step that follows a recharging step, or both.

Claims (18)

1. The method of regenerating purification media of a bulk process gas purifier system, the gas purifier system comprising:

a purifier comprising a vessel having a vessel interior that contains purification media,

an enclosure that encloses the vessel and defines an interspace that is inside the enclosure and external to the vessel, the enclosure comprising:

an enclosure inlet that allows a flow of ambient gas into the interspace,

an enclosure outlet that allows a flow of ambient gas from the interspace, and

a bulk process gas circulating system adapted to cause the bulk process gas to flow into the vessel interior, through the purification media, and out of the vessel interior, the method comprising:

passing bulk process gas through the purification media at purification temperature to cause impurities in the bulk process gas to be removed by the purification media, and to produce purified bulk process gas having a reduced level of the impurities,

after impurities have collected in the purification media, regenerating the purification media by passing regeneration gas having a regeneration gas temperature through the purification media, whereby the regeneration gas heats the purification media to a regeneration temperature to cause collected impurities to be removed from the purification media and flow from the vessel with the regeneration gas,

after regenerating the purification media, cooling the purification media by passing cooling gas, at a cooling gas temperature that is below the regeneration temperature, through the purification media to reduce the temperature of the purification media,

during cooling, passing a flow of ambient air through the interspace at an ambient air cooling temperature that is below 60 degrees Celsius, the ambient air:

passing from a location exterior to the system enclosure, through the enclosure inlet, and into the interspace,

circulating within the interspace in a non-convective manner, and

passing from the interspace through the enclosure outlet to a location exterior to the enclosure.

2. The method of claim 1 wherein the purification temperature is in a range from 10 degrees Celsius to 40 degrees Celsius.

3. The method of claim 1 comprising, during cooling, reducing the temperature of the purification media to below 60 degrees Celsius, wherein the time required to reduce the temperature of the purification media to below 60 degrees is less than 50 percent of the time that would be required to reduce the temperature of the purification media to below 60 degrees without passing the ambient air at an ambient air cooling temperature through the interspace.

4. The method of claim 1 wherein the bulk process gas is selected from: hydrogen, argon, helium, oxygen, carbon dioxide, nitrogen, ammonia (NH 3 ), and extra clean dry air.

5. The method of claim 1 wherein the cooling gas temperature is in a range from 10 degrees Celsius to 40 degrees Celsius.

6. The method of claim 1 wherein the ambient gas temperature is in a range from 10 degrees Celsius to 40 degrees Celsius.

Assignments (3)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060614/0980 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2021
From: SCHLOTTERBECK, MATTHEW; MURPHY, DAIMHIN
To: ENTEGRIS, INC.
Reel/Frame 056459/0095 →
Continuity (2)
Division 16230524 · Dec 21, 2018
Related Publication 20210291106A1 · Sep 23, 2021