IP Library Granted Patent US 11,779,866
Granted Patent B2
US 11,779,866 · App. 17/232,780 · Granted Oct 10, 2023

Modular filter manifold

Inventor: Barry L. Gregerson (Deephaven, MN)
Assignee: ENTEGRIS, INC.
B01D35/306B01D2201/302B01D2201/304B01D2201/4076B01D2201/4092
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Quick Facts
Patent No.
US 11,779,866
App. No.
17/232,780
Granted
Oct 10, 2023
Kind
B2
Abstract

A modular filter manifold includes one or more plates, each plate including connections for one or more filters on a first side, and connections for fluid lines on a second side opposite the first. At least two fluid line connections are provided for each filter connection, with a fluid passage through the plate for each fluid line connection. Each of the fluid passages are independent of one another. The manifold plates can be joined to a support structure to form a manifold to which filters can be attached. Piping can be connected to the fluid line connections to allow flow through the filters in series or parallel flow.

Claims (21)

1. A filter manifold, comprising:

at least one manifold plate, the manifold plate including:

a plate body having a first side and a second side, the second side opposite the first side;

at least two filter connections on the first side of the plate body, each filter connection including an outer wall and a divider; and

at least two fluid line connectors extending from the second side for each of the at least two filter connections, each of the fluid line connectors including a fluid passage passing through the manifold plate in a thickness direction of the plate body, each fluid passage including an opening at the first side that is located within the outer wall or the divider of one of the filter connections,

wherein for each filter connection, at least one of the openings at the first side is located within the divider and at least one of the openings at the first side is located between the divider and the outer wall, and

wherein each of the fluid passages of the fluid connectors being an independent path for fluid flow.

2. The filter manifold of claim 1 , wherein the filter manifold comprises a plurality of the manifold plates.

3. The filter manifold of claim 1 , wherein the fluid line connectors having openings located between the divider and the outer wall of two of the at least two filter connections are separated by a distance that is smaller than a distance between the fluid line connectors having openings located within the divider of each of said two of the at least two filter connections.

4. The filter manifold of claim 1 , wherein an outer side of each of the outer walls includes threading, the filter manifold further including a locking ring configured to engage the threading.

5. The filter manifold of claim 4 , further comprising a cap configured to cover one of the filter connections and wherein the locking ring is configured to retain the cap and a seal between the cap and one of the filter openings.

6. The filter manifold of claim 4 , wherein the locking ring includes one or more engagement features on an outer side of the locking ring.

7. The filter manifold of claim 4 , wherein the locking ring includes one or more engagement features on an upper surface of the locking ring.

8. The filter manifold of claim 1 , wherein the one or more manifold plates include a fluoropolymer.

9. The filter manifold of claim 1 , wherein the one or more manifold plates include a melt-processable polymer.

10. The filter manifold of claim 1 , wherein the plate body includes a basin surrounding the filter connections on the first side of the plate body.

11. The filter manifold of claim 10 , wherein the filter manifold further includes a drain fluid passage extending from the basin on first side to a connector provided on the second side of the plate body.

12. The filter manifold of claim 1 , including a plurality of void features extending into the plate body formed on one or more side walls of the plate body, the side walls each extending between the first side and the second side of the plate body.

13. The filter manifold of claim 12 , wherein the plurality of void features are each separated from one another by one or more ribs.

14. The filter manifold of claim 13 , wherein each of the ribs extends from one of the side walls to an opposite side wall, and each of the ribs passes between two of the fluid line connectors.

15. The filter manifold of claim 12 , wherein the first side of the plate body has an area greater than an area of the second side.

Assignments (3)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060614/0980 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 22, 2021
From: GREGERSON, BARRY L.
To: ENTEGRIS, INC.
Reel/Frame 058177/0056 →
Continuity (2)
Provisional Application 63016341 · Apr 28, 2020
Related Publication 20210331104A1 · Oct 28, 2021
Cited By (1)
US 12,311,292