IP Library Granted Patent US 12,411,075
Granted Patent B2
US 12,411,075 · App. 17/075,329 · Granted Sep 9, 2025

Optical sensor window cleaner

Inventor: Tracy Gast (Eden Prairie, MN)
Assignee: ENTEGRIS, INC.
G01N21/15B08B3/04G01N2021/155
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Quick Facts
Patent No.
US 12,411,075
App. No.
17/075,329
Granted
Sep 9, 2025
Kind
B2
Abstract

A sensor assembly includes a passageway for a process fluid, an optical window, an optical sensor, and a nozzle. The optical sensor configured to detect an optical property of the process fluid. The optical window includes an inner surface. The nozzle configured discharge an atomized fluid in a discharge direction that intersects the inner surface of the optical window. A sensor system includes a sensor assembly and conduits for supplying a gas and a liquid to a nozzle of the sensor assembly. A method of cleaning an optical window in a sensor assembly includes forming an atomized fluid and discharging the atomized fluid in a discharge direction that intersects the optical window.

Claims (43)

1. A sensor assembly, comprising:

a passageway for a process fluid to flow through the sensor assembly;

an optical window including an inner surface that forms a first portion of a sidewall of the passageway;

an optical sensor configured to transmit light through the optical window towards the passageway to detect a refractive index of the process fluid; and

a nozzle for discharging an atomized fluid containing a liquid and a gas wherein the gas disperses the liquid into droplets into the passageway in a direction that impacts the inner surface of the optical window;

wherein the nozzle includes an outer channel for the gas and an inner channel for the liquid, the outer channel surrounding the inner channel, the nozzle forming the atomized fluid by combining the gas with the liquid.

2. The sensor assembly of claim 1 , wherein the atomized fluid is discharged into the passageway through an opening in a second portion of the sidewall of the passageway.

3. The sensor assembly of claim 2 , wherein the first portion of the sidewall and the second portion of the sidewall are arranged on opposite sides in the passageway.

4. The sensor assembly of claim 1 , wherein an angle between the discharge direction and a direction normal to the inner surface of the optical window is less than 45 degrees.

5. The sensor assembly of claim 1 , wherein the atomized fluid contains about 0.05-20% volume of liquid.

6. The sensor assembly of claim 1 , wherein the liquid is deionized water and the gas is an inert gas.

7. A sensor system, comprising:

a sensor assembly for a process fluid, the sensor assembly including:

a passageway for the process fluid to flow through the sensor assembly;

an optical window with an inner surface that forms a sidewall of the passageway;

an optical sensor configured to transmit light through the optical window towards the passageway to detect a refractive index of the process fluid, and

a nozzle for forming an atomized fluid containing a liquid and a gas wherein the gas disperses the liquid into droplets, the nozzle configured to discharge the atomized fluid into the passageway in a direction that impacts the inner surface of the optical window

wherein the nozzle includes an outer channel for the gas and an inner channel for the liquid, the outer channel surrounding the inner channel, the nozzle forming the atomized fluid by combining the gas with the liquid;

a first conduit fluidly connected to the nozzle for supplying the liquid to the nozzle; and

a second conduit fluidly connected to the nozzle for supplying the gas to the nozzle.

8. The sensor system of claim 7 , wherein the process fluid contacts the inner surface of the optical window.

9. The sensor system of claim 7 , wherein the atomized fluid is discharged into the passageway through an opening in the sidewall of the passageway.

10. The sensor system of claim 9 , wherein the opening in the sidewall of the passageway and the optical window are arranged on opposite sides of the passageway.

11. The sensor assembly of claim 7 , wherein the nozzle includes an outer channel and an inner channel, the outer channel surrounding the inner channel, the first conduit supplying the liquid to the inner channel of the nozzle and the second conduit supplying the gas to the outer channel of the nozzle.

12. The sensor system of claim 7 , wherein the first conduit supplies a flowrate of the liquid to the nozzle and the second conduit supplies a flowrate of the gas to the nozzle such that the atomized fluid contains about 0.02%-20% volume of liquid.

13. The sensor system of claim 7 , wherein the first conduit supplies a flowrate of the liquid to the nozzle and the second conduit supplies a flowrate of the gas to the nozzle, the ratio of the flowrate of the liquid to the volume of gas is from 0.05:300 to 2:10.

14. The sensor system of claim 7 , further comprising:

a first flow valve controlling flow of the liquid through the first conduit to the nozzle;

a second flow valve controlling flow of the gas through the second conduit to the nozzle; and

the controller configured to close the first flow valve and the second flow valve when the process fluid is flowing into the passageway.

15. A method of cleaning an optical window in a sensor assembly, the sensor assembly including a passageway and an optical sensor that transmits light towards a passageway via the optical window to detect a refractive index of a process fluid flowing through the passageway, the method comprising:

forming an atomized fluid using a nozzle from a gas and a liquid wherein the gas disperses the liquid into droplets;

wherein the nozzle includes an outer channel for the gas and an inner channel for the liquid, the outer channel surrounding the inner channel, the nozzle forming the atomized fluid by combining the gas with the liquid; and

discharging the atomized fluid into the passageway in a direction that impacts an inner surface of the optical window.

16. The method of claim 15 , wherein forming the atomized fluid includes:

supplying a flow of the liquid to a nozzle,

supplying a flow of the gas to the nozzle,

mixing, in the nozzle, the flow of the liquid and the flow of the gas.

17. The method of claim 15 , wherein

discharging the atomized fluid into the passageway in the direction that impacts the inner surface of the optical window includes directing the atomized fluid through an opening in a sidewall of the passageway in the direction.

18. The method of claim 15 , further comprising:

supplying a flow of the process fluid to the passageway; and

stopping the flow of the process fluid into the passageway before discharging the atomized fluid into the passageway.

Assignments (3)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060614/0980 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 20, 2020
From: GAST, TRACY
To: ENTEGRIS, INC.
Reel/Frame 054113/0183 →
Continuity (2)
Provisional Application 62931409 · Nov 6, 2019
Related Publication 20210131949A1 · May 6, 2021
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