IP Library Granted Patent US 12,330,105
Granted Patent B2
US 12,330,105 · App. 17/486,127 · Granted Jun 17, 2025

Self-locking manifold and filter

Inventors: Kobold Yang (Hsinchu, TW); Han Yi Wang (Hsinchu, TW); Bob Shie (Hsinchu, TW); Hee Jun Yang (Songpa-gu, KR)
Assignee: ENTEGRIS, INC.
B01D46/001B01D46/0012B01D46/0015
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Quick Facts
Patent No.
US 12,330,105
App. No.
17/486,127
Granted
Jun 17, 2025
Kind
B2
Abstract

A filter that is self-locking to a filter manifold includes a flange having a major axis and a minor axis in plan view, and that is longer along the major axis than the minor axis. The filter further includes a stopper on the major axis, that can contact a filter manifold when the filter is inserted into the manifold and rotated. The filter can be used with a filter manifold having a slot with an opening having a width greater than the length of the minor axis and smaller than the length along the major axis of the flange, and past the opening, has sufficient width to accommodate the length of the major axis. This arrangement allows the flange to be inserted into the slot in an insertion orientation, but does not permit the flange to pass through the opening of the slot when it is in a locking position.

Claims (37)

1. A filter, comprising:

a body;

a first end having a first filter aperture;

a first flange, located at the first end;

a second end, opposite the first end and having a second filter aperture,

wherein the first flange has a shape in plan view including a major axis and a minor axis and has a greater length along the major axis than a width along the minor axis, and

the first flange includes a stopper protruding from the first flange, the stopper configured to contact a retention feature of a filter manifold when the first flange is inserted into the filter manifold and rotated into a locking position.

2. The filter of claim 1 , further comprising a seal disposed on the first flange, the seal surrounding the first filter aperture.

3. The filter of claim 2 , wherein the seal is a face seal.

4. The filter of claim 2 , wherein the seal is disposed in a groove formed in the first flange.

5. The filter of claim 1 , wherein the shape in plan view of the first flange includes straight sides parallel to the major axis.

6. The filter of claim 5 , wherein the first flange includes a chamfer towards the straight sides.

7. The filter of claim 5 , wherein the stopper protrudes from the first flange such that an edge of the stopper is collinear with one of the straight sides.

8. The filter of claim 1 , wherein each end along the major axis of the shape in plan view of the first flange includes a curve.

9. The filter of claim 8 , wherein the shape in plan view of the first flange further includes straight sides parallel to the major axis.

10. The filter of claim 9 , wherein the stopper extends from a corner where the curve of one end along the major axis meets one of the straight sides.

11. A filter and manifold system, including:

a filter, comprising:

a body;

a first end having a first filter aperture;

a first flange, located at the first end; and

a second end, opposite the first end and having a second filter aperture,

wherein the first flange has a shape in plan view including a major axis and a minor axis and has a greater length along the major axis than a width along the minor axis, and

the first flange includes a stopper protruding from the first flange; and

a manifold, comprising:

a first end block, including a first end block aperture and a slot configured to receive the first flange of the filter, wherein the slot has an opening that has a width that is greater than the width along the minor axis and that is smaller than the length across the major axis, and an internal slot width that is greater than the length of the first flange along the major axis, and an engagement feature configured to contact the stopper of the filter when the first flange is inserted into the slot and the filter is rotated into the locking position;

a second end block, including a second end block aperture and an opening configured to receive at least a portion of the second end of the filter,

wherein when the filter is in the locked position, fluid can flow from the second end block aperture through the second filter aperture, through the body, through the first filter aperture, and to the first end block aperture.

12. The filter and manifold system of claim 11 , wherein the shape in plan view of the first flange includes straight sides parallel to the major axis.

13. The filter and manifold system of claim 12 , wherein the stopper protrudes from the first flange such that an edge of the stopper is collinear with one of the straight sides.

14. The filter and manifold system of claim 13 , wherein the stopper has an end perpendicular to the edge of the stopper.

15. The filter and manifold system of claim 11 , wherein each end along the major axis of the shape in plan view of the first flange includes a curve.

16. The filter and manifold system of claim 15 , wherein the shape in plan view of the first flange further includes straight sides parallel to the major axis.

17. The filter and manifold system of claim 16 , wherein the stopper extends from a corner where the curve of one end along the major axis meets one of the straight sides.

18. The filter and manifold system of claim 11 , wherein the engagement feature is a side wall of the slot.

19. The filter and manifold system of claim 18 , wherein the side wall of the slot is at the opening of the slot.

20. The filter and manifold system of claim 11 , wherein the filter includes a filter alignment mark and the manifold includes a manifold alignment mark, and wherein the relative positions of the filter alignment mark and the manifold alignment mark are indicative of whether the filter is in an insertion position relative to the manifold.

Assignments (3)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060614/0980 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 27, 2021
From: YANG, KOBOLD; WANG, HAN YI; SHIE, BOB; YANG, HEE JUN
To: ENTEGRIS, INC.
Reel/Frame 057610/0099 →
Continuity (2)
Provisional Application 63085639 · Sep 30, 2020
Related Publication 20220096984A1 · Mar 31, 2022
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Cited By (1)
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