IP Library Granted Patent US 11,788,902
Granted Patent B2
US 11,788,902 · App. 17/116,738 · Granted Oct 17, 2023

Accurate temperature reading of fluid near interface

Inventor: Michael Manfred (Minnetonka, MN)
Assignee: ENTEGRIS, INC.
G01K7/427G01K13/02G01N21/41G01N21/4133G01N2021/414
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Quick Facts
Patent No.
US 11,788,902
App. No.
17/116,738
Granted
Oct 17, 2023
Kind
B2
Abstract

Systems and methods for determining temperature or temperature related variables using a sensor having a measurement surface include a sensor body having one or more walls and containing an intermediary material, a window providing a measurement surface, a first temperature sensor obtaining a first temperature at or near the window, a second temperature sensor located within the intermediary material, and a processor configured to receive the first temperature and the second temperature and determine a temperature adjustment based on those temperatures. The temperature adjustment can be used to adjust a value of a temperature related variable based on the temperature at the measurement surface, for example for calculating a refractive index of a fluid. Additional temperature sensors may be included and further included in the determination of the temperature adjustment.

Claims (55)

1. A refractive index sensor, comprising:

a sensor module body, including one or more walls defining an internal space;

a window;

an optical refractive index sensor located within the sensor module body, the optical refractive index sensor configured to measure refractive index;

an intermediary material located within the internal space and in contact with the window;

a first temperature sensor located within the intermediary material at a first position;

a second temperature sensor located within the intermediary material at a second position, the second position being farther from the window than the first position; and

a processor configured to:

receive a first temperature from the first temperature sensor;

receive a second temperature from the second temperature sensor; and

determine a temperature adjustment as a function of the first temperature and the second temperature; and

adjust an extrapolated refractive index value from the optical refractive index sensor based on the temperature adjustment.

2. The refractive index sensor of claim 1 , further comprising a third temperature sensor located within the intermediary material at a third position, that is separated from the first and second positions,

wherein the processor is configured to receive a third temperature from the third temperature sensor, and

the temperature adjustment is a function of the first temperature, the second temperature, and the third temperature.

3. The refractive index sensor of claim 1 , wherein the intermediary material has a thermal conductivity that is greater than a thermal conductivity of the one or more walls.

4. The refractive index sensor of claim 1 , wherein the processor is included on a circuit board that is separate from the intermediary material.

5. The refractive index sensor of claim 1 , wherein the first temperature sensor contacts the window.

6. The refractive index sensor of claim 1 , wherein the first temperature sensor is fixed to the window by a temperature-conductive adhesive.

7. The refractive index sensor of claim 1 , wherein the function of the first temperature and the second temperature is a linear function.

8. A method of temperature compensation in a sensor, comprising:

obtaining a temperature-variable property at a measurement surface;

obtaining a first temperature at a first position within the sensor;

obtaining a second temperature at a second position within the sensor, the second position being farther from the measurement surface than the first position;

determining a temperature adjustment as a function of the first temperature and the second temperature; and

adjusting the measured temperature-variable property based on the determined temperature adjustment,

wherein the first position within the sensor and the second position within the sensor are separated by an intermediary material;

wherein the intermediary material fills a space defined by a plurality of walls.

9. The method of claim 8 , wherein the measurement surface is at a window of the sensor.

10. The method of claim 8 , wherein the function of the first temperature and the second temperature is a linear function.

11. The method of claim 8 , wherein the temperature-variable property is a refractive index.

12. The method of claim 8 , wherein the function of the first temperature and the second temperature is determined by a calibration process including:

providing a flow of a reference fluid over the measurement surface at a predetermined temperature;

obtaining the first temperature;

obtaining the second temperature;

selecting values for one or more constants in the function such that the temperature adjustment corresponds to the predetermined temperature.

13. The method of claim 8 , further comprising obtaining a third temperature at a third position within the sensor, the third position that is separated from the first position and the second position and wherein the temperature adjustment is a function of the first temperature, the second temperature, and the third temperature.

14. A sensor module, comprising:

a sensor module body, including one or more walls defining an internal space;

a window;

an optical sensor, located within the sensor module body, the optical sensor configured to measure a temperature-variable property;

an intermediary material, located within the internal space and in contact with the window;

a first temperature sensor located within the intermediary material at a first position;

a second temperature sensor located within the intermediary material at a second position, the second position being farther from the window than the first position; and

a processor configured to:

receive a first temperature from the first temperature sensor;

receive a second temperature from the second temperature sensor; and

determine a temperature adjustment as a function of the first temperature and the second temperature.

15. The sensor module of claim 14 , wherein the temperature-variable property is an extrapolated refractive index.

16. The sensor module of claim 14 , further comprising a third temperature sensor located within the intermediary material at a third position, that is separated from the first and second positions,

wherein the processor is configured to receive a third temperature from the third temperature sensor, and

the temperature adjustment is a function of the first temperature, the second temperature, and the third temperature.

17. The sensor module of claim 14 , wherein the processor is further configured to adjust the refractive index based on the temperature adjustment.

18. The sensor module of claim 14 , wherein the processor is included on a circuit board that is separate from the intermediary material.

19. The sensor module of claim 14 , wherein the function of the first temperature and the second temperature is a linear function.

Assignments (3)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060614/0980 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2020
From: MANFRED, MICHAEL
To: ENTEGRIS, INC.
Reel/Frame 054597/0306 →
Continuity (2)
Provisional Application 62951474 · Dec 20, 2019
Related Publication 20210190602A1 · Jun 24, 2021