Storage and delivery veseel for storing GeH4, using a zeolitic adsorbent
Described are storage and dispensing systems and related methods, for the selective dispensing germane (GeH 4 ) as a reagent gas from a vessel in which the germane is held in sorptive relationship to a solid adsorbent medium that includes a zeolitic imidazolate framework.
1. A storage and dispensing vessel enclosing an interior volume that contains zeolitic imidazolate framework adsorbent, and GeH 4 adsorbed on the adsorbent, the vessel comprising:
a port;
a valve mounted at the port;
zeolitic imidazolate framework adsorbent within the interior volume; and
GeH 4 adsorbed on the zeolitic imidazolate framework;
the vessel being selectively actuatable to flow gaseous GeH 4 from the interior volume of the vessel, through the valve, for discharge of the GeH 4 from the vessel; and
wherein the amount of degradation of GeH 4 to hydrogen gas (H 2 ) is less than 1 percent of total initial adsorbed germane, over a period of 365 days, at 30 degrees Celsius; and
a storage capacity for the GeH 4 of at least 100 g/kg.
2. A vessel of claim 1 having an interior pressure below 760 Torr.
3. A vessel of claim 1 wherein the zeolitic imidazolate framework comprises tetrahedrally-coordinated zinc atoms connected by imidazolate linkers.
4. A vessel of claim 3 wherein the zeolitic imidazolate framework is zinc dimethylimidazolate.
5. A vessel of claim 1 containing GeH 4 within the interior volume at sub-atmospheric pressure, the GeH 4 comprising a portion that is adsorbed on the adsorbent and a portion that is present as condensed or gaseous GeH 4 in equilibrium with the adsorbed GeH 4 .
6. A vessel of claim 1 capable of dispensing from the vessel at least 95 percent of the germane contained in the vessel.
7. A vessel of claim 1 capable of dispensing from the vessel at least 99 percent of the germane contained in the vessel.
8. A vessel of claim 1 capable of dispensing the germane contained in the vessel at a discharge pressure that is below 10 Torr.
9. A vessel of claim 1 wherein the amount of degradation of GeH 4 to hydrogen gas (H 2 ) is less than 0.1 percent of total initial adsorbed germane, over a period of 365 days, at 30 degrees Celsius.
10. A vessel of claim 1 wherein the amount of degradation of GeH 4 to hydrogen gas (H 2 ) is less than 0.01 percent of total initial adsorbed germane, over a period of 365 days, at 30 degrees Celsius.
11. A vessel of any of claim 1 wherein the adsorbent is in the form of granules, particulates, beads, or pellets.
12. A method of supplying GeH 4 from a vessel as recited at claim 1 , the method comprising delivering the GeH 4 from the vessel interior to a vessel exterior, the GeH 4 being delivered from the vessel at a pressure below 760 torr.
13. A method of claim 12 wherein the GeH 4 is delivered at a pressure below 50 Torr.
14. A method of claim 12 wherein the GeH 4 is delivered at a pressure below 10 Torr.
15. A method of claim 12 comprising delivering the GeH 4 to a semiconductor processing device.
16. A method of claim 13 wherein the vessel contains an initial amount of GeH 4 charged to the interior, and the method comprises dispensing at least 95 percent of the initial amount to the semiconductor processing device.
17. A method of claim 13 wherein the vessel contains an initial amount of GeH 4 charged to the interior, and the method comprises dispensing at least 99 percent of the initial amount to the semiconductor processing device.