IP Library › Granted Patent US 11,804,375
Granted Patent Utility
US 11,804,375 · Confirmation No. 7801

HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEPOSITION OF COBALT

Applicant: ENTEGRIS, INC.
⬇ PDF
 Code Description Pages PDF
2023-10-31 EGRANT.PDF Digitally signed official patent eGrant document — View
2023-10-31 EGRANT.NTF eGrant day-of Notification 2 View
2023-10-11 ISSUE.NTF Issue Notification 2 View
2023-09-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2023-09-28 WFEE Fee Worksheet (SB06) 2 View
2023-09-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-06-30 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2023-06-30 FWCLM Index of Claims 1 View
2023-06-30 SRFW Search information including classification, databases and other search related notes 2 View
2023-06-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 3 View
2023-06-30 SRNT Examiner's search strategy and results 35 View
2023-06-30 1449 List of References cited by applicant and considered by examiner 4 View
2023-06-05 RCEX Request for Continued Examination (RCE) 3 View
2023-06-05 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2023-06-05 FOR Foreign Reference 36 View
2023-06-05 WFEE Fee Worksheet (SB06) 2 View
2023-06-05 N417 Electronic Filing System Acknowledgment Receipt 3 View
2023-04-26 R48.REQ.G Acceptance of Request under Rule 48 to correct inventorship or name 1 View
2023-04-26 APP.FILE.REC Filing Receipt 4 View
2023-04-20 R48.REQ Request under Rule 48 correcting inventorship 3 View
2023-04-20 ADS Application Data Sheet 9 View
2023-04-20 WFEE Fee Worksheet (SB06) 2 View
2023-04-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-03-28 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2023-03-24 R48.REQ.DIS Rejection of Request under Rule 48 to correct inventorship or name 1 View
2023-03-07 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2023-03-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 3 View
2023-03-07 FWCLM Index of Claims 1 View
2023-03-07 SRFW Search information including classification, databases and other search related notes 2 View
2023-03-07 SRNT Examiner's search strategy and results 2 View
2023-02-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2023-02-14 CLM Claims 2 View
2023-02-14 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2023-02-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-02-14 WFEE Fee Worksheet (SB06) 1 View
2022-11-14 CTNF Non-Final Rejection 4 View
2022-11-14 SRFW Search information including classification, databases and other search related notes 2 View
2022-11-14 FWCLM Index of Claims 1 View
2022-11-14 SRNT Examiner's search strategy and results 3 View
2022-10-13 RCEX Request for Continued Examination (RCE) 3 View
2022-10-13 WFEE Fee Worksheet (SB06) 2 View
2022-10-13 N417 Electronic Filing System Acknowledgment Receipt 3 View
2022-10-13 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2022-10-13 CLM Claims 3 View
2022-10-13 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2022-10-13 WFEE Fee Worksheet (SB06) 1 View
2022-09-26 CTAV Advisory Action (PTOL-303) 2 View
2022-09-26 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2022-09-26 A.NE.AFCP.D After Final Consideration Program Decision 1 View
2022-09-26 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2022-09-14 A.NE Response After Final Action 1 View
2022-09-14 CLM Claims 3 View
2022-09-14 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2022-09-14 A.NE.AFCP After Final Consideration Program Request 2 View
2022-09-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-09-14 WFEE Fee Worksheet (SB06) 1 View
2022-07-14 CTFR Final Rejection 10 View
2022-07-14 FWCLM Index of Claims 1 View
2022-06-21 WFEE Fee Worksheet (SB06) 1 View
2022-06-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2022-06-21 SPEC Specification 1 View
2022-06-21 CLM Claims 3 View
2022-06-21 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2022-06-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-03-23 CTNF Non-Final Rejection 9 View
2022-03-23 FWCLM Index of Claims 1 View
2022-03-23 SRFW Search information including classification, databases and other search related notes 1 View
2022-03-23 SRNT Examiner's search strategy and results 4 View
2022-03-02 RCEX Request for Continued Examination (RCE) 3 View
2022-03-02 WFEE Fee Worksheet (SB06) 2 View
2022-03-02 N417 Electronic Filing System Acknowledgment Receipt 3 View
2022-03-02 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2022-03-02 CLM Claims 3 View
2022-03-02 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2022-03-02 WFEE Fee Worksheet (SB06) 1 View
2021-12-15 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2021-12-07 CTFR Final Rejection 9 View
2021-12-07 892 List of references cited by examiner 1 View
2021-12-07 FWCLM Index of Claims 1 View
2021-12-07 SRFW Search information including classification, databases and other search related notes 1 View
2021-12-07 SRNT Examiner's search strategy and results 4 View
2021-11-08 WFEE Fee Worksheet (SB06) 1 View
2021-11-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2021-11-08 CLM Claims 3 View
2021-11-08 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2021-11-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-08-18 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2021-08-10 CTNF Non-Final Rejection 7 View
2021-08-10 892 List of references cited by examiner 1 View
2021-08-10 SRFW Search information including classification, databases and other search related notes 1 View
2021-08-10 FWCLM Index of Claims 1 View
2021-08-10 1449 List of References cited by applicant and considered by examiner 4 View
2021-08-10 BIB Bibliographic Data Sheet 1 View
2021-08-10 1449 List of References cited by applicant and considered by examiner 5 View
2021-08-10 SRNT Examiner's search strategy and results 3 View
2021-07-19 ELC. Response to Election / Restriction Filed 1 View
2021-07-19 CLM Claims 2 View
2021-07-19 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2021-07-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-07-19 WFEE Fee Worksheet (SB06) 1 View
2021-06-16 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2021-06-11 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2021-06-11 FOR Foreign Reference 33 View
2021-06-11 FOR Foreign Reference 50 View
2021-06-11 FOR Foreign Reference 14 View
2021-06-11 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-06-08 CTRS Requirement for Restriction/Election 6 View
2021-06-08 FWCLM Index of Claims 1 View
2021-03-18 NTC.PUB Notice of Publication 1 View
2021-03-03 ADS Application Data Sheet 9 View
2021-03-03 OATH Oath or Declaration filed 2 View
2021-03-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2020-12-11 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2020-12-11 WFEE Fee Worksheet (SB06) 1 View
2020-12-11 APP.FILE.REC Filing Receipt 4 View
2020-12-09 WFEE Fee Worksheet (SB06) 1 View
2020-11-19 PA.. Power of Attorney 1 View
2020-11-19 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2020-11-19 ABST Abstract 1 View
2020-11-19 CLM Claims 2 View
2020-11-19 SPEC Specification 14 View
2020-11-19 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2020-11-19 CLM Claims 2 View
2020-11-19 SPEC Specification 1 View
2020-11-19 A.PE Preliminary Amendment 1 View
2020-11-19 OATH Oath or Declaration filed 1 View
2020-11-19 OATH Oath or Declaration filed 2 View
2020-11-19 OATH Oath or Declaration filed 2 View
2020-11-19 OATH Oath or Declaration filed 2 View
2020-11-19 OATH Oath or Declaration filed 2 View
2020-11-19 ADS Application Data Sheet 9 View
2020-11-19 DRW.NONBW Drawings-other than black and white line drawings 1 View
2020-11-19 WFEE Fee Worksheet (SB06) 2 View
2020-11-19 N417 Electronic Filing System Acknowledgment Receipt 4 View
2020-11-19 TRNA Transmittal of New Application 4 View
2020-11-19 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2020-11-19 DRW.SUPP Drawings-black and white line and/or other drawings — View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 11,804,375
App. No.
16/952,985
Filed
2020-11-19
Granted
2023-10-31
Pub. No.
US20210082708A1
Art Unit
1761
PTA
-90 days