Microelectronic device cleaning composition
A composition for cleaning a microelectronic device substrate is provided. The composition is useful for cleaning in-process microelectronic device substrates possessing exposed cobalt, molybdenum, copper, molybdenum, tungsten, and dielectric surfaces. Also provided is a method for cleaning such devices and a kit comprising one or more of the components of the composition.
1 . A composition comprising:
water;
a complexing agent; and
an amino(C 6 -C 12 alkyl)alcohol;
wherein said composition is devoid of a guanidine functional compound, a pyrazolone functional compound, and a hydroxyquinoline compound, and wherein the pH of the composition is between about 1.5 and 6.
2 . The composition of claim 1 , wherein the amino(C 6 -C 12 alkyl)alcohol is an amino(C 8 -C 10 alkyl)alcohol.
3 . The composition of claim 1 , further comprising a C 2 -C 4 alkanolamine.
4 . The composition of claim 1 , wherein the complexing agent is selected from the group consisting of
4-(2-hydroxyethyl) morpholine; 1,2-cyclohexanediamine-N,N,N′,N′-tetraacetic acid, hydroxyethyldiethylenetraminetriacetic acid; ethylenediaminetetraacetic acid; m-xylenediamine; iminodiacetic acid; trimethylamine: isopropanolamine: diisopropanolamine; piperazine; hydroxyethylpiperazine; dihydroxyethylpiperizine; glucamine; N-methylglucamine; 2-(hydroxyethyl)iminodiacetic acid; nitrilotriacetic acid; thiourea; 1,1,3,3-tetramethylurea; urea; uric acid;
amino acids selected from alanine; arginine; asparagine; aspartic acid; cysteine; glutamic acid; glutamine; histidine; isoleucine; leucine; lysine; methionine; phenylalanine; proline; serine; threonine; tryptophan; tyrosine; valine; taurine; betaine;
compounds comprising phosphonic acid moieties selected from 1-hydroxyethylidene-1,1-diphosphonic acid; 1,5,9-triazacyclododecane-N,N′,N″-tris(methylenephosphonic acid); 1,4,7,10-tetraazacyclododecane-N,N′,N″,N′″-tetrakis(methylenephosphonic acid); nitrilotris(methylene)triphosphonic acid; diethylenetriaminepentakis(methylenephosphonic acid); aminotri(methylenephosphonic acid); bis(hexamethylene)triamine pentamethylene phosphonic acid; 1,4,7-triazacyclononane-N,N′,N″-tris(methylenephosphonic acid; hydroxyethyldiphosphonate; nitrilotris(methylene)phosphonic acid; and
carboxylic acids selected from 2-phosphono-butane-1,2,3,4-tetracarboxylic; carboxy ethyl phosphonic acid; aminoethyl phosphonic acid; glyphosate; ethylene diamine tetra(methylenephosphonic acid); phenylphosphonic acid; carboxylic acids chosen from oxalic acid, succinnic acid, maleic acid, malic acid, malonic acid, adipic acid, phthalic acid, citric acid, sodium citrate, potassium citrate, ammonium citrate, tricarballylic acid, trimethylolpropionic acid, picolinic acid, dipicolinic acid, salicylic acid sulfosalicylic acid, sulfophthalic acid, sulphosuccinic acid, gluconic acid, tartaric acid, glucuronic acid, 2-carboxypyridine) and sulfonic acids chosen from (4,5-Dihydroxy-1,3-benzenedisulfonic acid disodium salt.
5 . The composition of claim 1 , wherein the amino(C 6 -C 10 alkyl)alcohol is selected from the group consisting of 3-amino-4-octanol; DL-2-amino-1-hexanol; 2-(butylamino)ethanol; 1-aminocyclohexanol; and 8-amino-1-octanol.
6 . The composition of claim 1 , wherein the amino(C 8 -C 12 alkyl)alcohol comprises 3-amino-4-octanol.
7 . The composition of claim 1 , further comprising a water-soluble or water-dispersible polymer.
8 . The composition of claim 1 , further comprising a biocide.
9 . The composition of claim 1 , further comprising a surfactant.
10 . The composition of claim 1 , further comprising a water miscible solvent and/or adjuvant.
11 . The composition of claim 10 , wherein the water-miscible solvent and/or adjuvant is selected from the group consisting of glycerol, sorbitol, glycol ethers, and urea.
12 . The composition of claim 1 , further comprising:
choline hydroxide;
and
monoethanolamine.
13 . The composition of claim 12 wherein the amino(C 8 -C 12 alkyl)alcohol is selected from the group consisting of 3-amino-4-octanol; DL-2-amino-1-hexanol; 2-(butylamino)ethanol; 1-aminocyclohexanol; and 8-amino-1-octanol.
14 . The composition of claim 13 , further comprising sorbitol.
15 . The composition of claim 1 , wherein the composition is a concentrate that contains less than 80 weight percent water.
16 . The composition of claim 1 , further comprising a compound selected from the group consisting of morpholine, L-cysteine, dicyandiamide, hydroxy ethyl cellulose, polyvinylpyrrolidone, a polyamine, and combinations thereof.