Patent Assignment
Reel/Frame 058177/0776
Assignment of Assignor's Interest
Recorded: 2021-11-22
Pages: 22
Assignors
WATANABE, TSUYOSHI
Executed: 2020-11-15
TSUCHIYAMA, MASASHI
Executed: 2021-11-01
ENOKIDA, SUGURU
Executed: 2021-11-01
YAMAMOTO, TARO
Executed: 2021-11-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method