Patent Assignment
Reel/Frame 058193/0560
Assignment of Assignor's Interest
Recorded: 2021-11-23
Pages: 5
Assignors
LIU, CHUN-TING
Executed: 2021-11-11
WU, WEN-LI
Executed: 2021-11-10
HE, BO-CHING
Executed: 2021-11-12
CHEN, GUO-DUNG
Executed: 2021-11-12
WU, SHENG-HSUN
Executed: 2021-11-12
FU, WEI-EN
Executed: 2021-11-16
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
195, SEC. 4, CHUNG HSING RD., CHUTUNG, HSINCHU, 310401, TAIWAN
Covered Property
(1)
X-Ray Reflectometry Apparatus and Method Thereof for Measuring Three Dimensional Nanostructures on Flat Substrate