Patent Assignment
Reel/Frame 058222/0493
Assignment of Assignor's Interest
Recorded: 2021-11-29
Pages: 2
Assignor
KITAMURA, SHINGO
Executed: 2021-11-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus for Plasma Processing and Plasma Processing System