Patent Assignment
Reel/Frame 058236/0839
Assignment of Assignor's Interest
Recorded: 2021-11-23
Pages: 2
Assignors
LEE, CHUNG WOO
Executed: 2021-11-22
PARK, IN KYU
Executed: 2021-11-22
JANG, YONG SEOK
Executed: 2021-11-22
JEON, SUNG YOUN
Executed: 2021-11-22
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Support Unit, Substrate Treating Apparatus Including the Same and Temperature Control Method