Patent Assignment
Reel/Frame 058247/0489
Assignment of Assignor's Interest
Recorded: 2021-11-30
Pages: 5
Assignee
ILLINOIS INSTITUTE OF TECHNOLOGY
10 WEST 35TH STREET, SUITE 1900, CHICAGO, ILLINOIS, 60616
Covered Property
(1)
Thermal Atomic Layer Deposition of Ternary Gallium Oxide Thin Films