Patent Assignment
Reel/Frame 058321/0820
Assignment of Assignor's Interest
Recorded: 2021-12-07
Pages: 3
Assignors
BENVEGNU, DOMINIC J.
Executed: 2005-09-29
DAVID, JEFFREY DRUE
Executed: 2005-09-26
SWEDEK, BOGUSLAW A.
Executed: 2005-09-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Endpoint Detection for Chemical Mechanical Polishing Based on Spectrometry