Patent Assignment
Reel/Frame 058390/0728
Assignment of Assignor's Interest
Recorded: 2021-12-14
Pages: 3
Assignors
CHEN, SHANG-CHUN
Executed: 2021-12-02
YEH, PO-CHUN
Executed: 2021-12-02
TZENG, PEI-JER
Executed: 2021-12-02
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
195, SEC. 4, CHUNG HSING RD., CHUTUNG,, HSINCHU, 310401, TAIWAN
Covered Property
(1)
Semiconductor Structure Including Insulating Vacancy for Improving Operation Performance and Method of Fabricating the Same
Application:
17/545,996 →
Publication:
US 2023/0147806