Patent Assignment
Reel/Frame 058418/0147
Assignment of Assignor's Interest
Recorded: 2021-12-17
Pages: 14
Assignors
SHINDO, TAKEHIRO
Executed: 2021-11-26
TAKAHASHI, AKIRA
Executed: 2021-11-26
HORIUCHI, TAKASHI
Executed: 2021-12-10
KODAMA, TOSHIAKI
Executed: 2021-12-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus for Transporting Substrate, System for Processing Substrate, and Method of Transporting Substrate