Patent Assignment
Reel/Frame 058443/0439
Assignment of Assignor's Interest
Recorded: 2021-12-21
Pages: 3
Assignor
OUYANG, CHRISTINE Y
Executed: 2019-05-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Photolithography Method with Infiltration for Enhanced Sensitivity and Etch Resistance