Patent Assignment
Reel/Frame 058444/0426
Assignment of Assignor's Interest
Recorded: 2021-12-21
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Apparatus Including a Substrate Chuck, a Dispenser, and a Planarization Head and Methods of Using the Same