Patent Assignment
Reel/Frame 058448/0350
Assignment of Assignor's Interest
Recorded: 2021-12-21
Pages: 6
Assignors
SUN, JONGWOO
Executed: 2021-10-07
KIM, KYOHYEOK
Executed: 2021-10-08
KIM, TAEHWA
Executed: 2021-10-08
PARK, HAEJOONG
Executed: 2021-10-08
HAN, JEWOO
Executed: 2021-10-08
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and Method for Plasma Etching