Patent Assignment
Reel/Frame 058526/0058
Assignment of Assignor's Interest
Recorded: 2021-12-16
Pages: 12
Assignors
HIRATA, TOSHIHARU
Executed: 2021-11-29
NAKAGAWASAI, MANABU
Executed: 2021-12-13
ISHII, TAKASHI
Executed: 2021-11-29
IOBE, KEIICHI
Executed: 2021-12-13
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Temperature Control Method of Substrate Processing Apparatus, and Program of Control Device for Controlling Substrate Processing Apparatus